Effect of H2O2 Treatment on Mechanical and Mechanochemical Properties of Fused Silica

The surface properties of fused silica (FS) change after H2O2 treatment, but the and subsurface damage behaviors their mechanisms under various physical contact conditions have not been elucidated yet. This work investigated effect treatment on mechanical mechanochemical FS surface. results show that hydrophilicity adsorbed water film thickness increase with concentration solution. damage, nanowear, deformation caused by indentation solution, while nanohardness reduced modulus decrease. Further analysis revealed activity plays a critical role in reducing properties. In addition, solution shows weakly corrosive effect, which implies can be an alternative method to remove defects optics.